t
|
单位
|
KGPS-100
|
KGPS
-160
|
KGPS
-200
|
KGPS
-250
|
坩埚有效容积
(直径×高)Effective volume of the crucible (Diameter × height) |
mm
|
Φ200×300
|
Φ450×700
|
Φ550×700
|
Φ650×750
|
中频电源功率IF power
supply power
|
Kw
|
100
|
160
|
200
|
250
|
中频电源频率IF power
supply frequency
|
Hz
|
2500
|
2500
|
2500
|
2500
|
Zui高工作温度Maximum
working temperature
|
℃
|
2500
|
2500
|
2500
|
2500
|
极限真空度Ultimate
vacuum
|
Pa
|
1.2×10-1
|
1.2×10-1
|
1.2×10-1
|
1.2×10-1
|
压升率Pressure
rise rate
|
Pa/h
|
0.5
|
0.5
|
0.5
|
0.5
|
恒温区温差Constant
temperature zone temperature
|
℃
|
±10
|
±10
|
±10
|
±10
|