t
|
单位unit
|
KGPS
-100
|
KGPS
-160
|
KGPS
-200
|
KGPS
-250
|
KGPS 300
|
坩埚有效容积
(直径×高)Effective volume of the crucible (Diameter × height) |
mm
|
Φ200×350
|
Φ300×500
|
Φ400×1000
|
Φ500×1000
|
Φ600×1000
|
中频电源功率IF power
supply power
|
Kw
|
100
|
160
|
200
|
250
|
300
|
中频电源频率IF power
supply frequency
|
Hz
|
4000
|
4000
|
2500
|
2000
|
2000
|
Zui高工作温度Maximum
working temperature
|
℃
|
3000
|
3000
|
3000
|
3000
|
3000
|
极限真空度Ultimate
vacuum
|
Pa
|
1.2×10-1
|
1.2×10-1
|
1.2×10-1
|
1.2×10-1
|
1.2×10-1
|
压升率Pressure
rise rate
|
Pa/h
|
2
|
2
|
2
|
2
|
2
|
恒温区温差Constant
temperature zone temperature difference
|
℃
|
±10
|
±10
|
±10
|
±15
|
±15
|