半导体/新能源/集成电路……超声波清洗机

硅片超声波清洗机是根据硅片特性专业设计的超声波清洗设备，具有清洗、漂洗、快冲快排、缓冲刻蚀、干燥等功能。设备利用超声波空化渗透力强的工作原理，并结合清洗剂的化学除油除污作用，有效清除吸附在晶圆表面的各种杂质粒子，如微粒、有机物、无机物金属离子等，使晶圆的表面洁净度达到ulsi工艺要求。

技术参数：

电源：380v 50hz

超声功率：1800w/槽*8槽

超声频率：40/68khz

加热功率：6kw/槽

循环过滤：杭州南方不锈钢泵，chl2-20/370w，三芯滤芯20寸不锈钢过滤器

抛动电机：台湾晟邦减速电机ch750-150sz

清洗能力：100片/次

功能特点：

1、清洗过程中，工件在清洗槽内作上下抛动，提高洁净度。

2、清洗槽底部设计成三面倾斜，并设有掏渣口，有利于清理杂质。

3、清洗节拍：根据工件的洁净度要求任意调节清洗时间。

4、全封闭结构，配有抽风吸雾装置，改善工作环境。

5、气动式传动机械臂运行安全稳定可靠，使用寿命长。

6、plc+触摸屏全自动控制，整体设计美观大方，操作方便。

kldqjx series fully-automatic multi-arm ultrasonic cleaning line

operating process

feeding → ultrasonic cleaning → bubble rinsing → ultrasonic fine cleaning → hot-dipping rinsing → hot-wind drying → discharging

the e adopts plc control multi-arm manipulator to feed automatically, operate automatically and clean every position. it enjoys high efficiency, superb cleanness, and adjustable working speed. it can reduce labor intensity, cutting down intermediate links, and finishing the whole process on the production line from cleaning to drying.

feature of structure

fully stainless steel structure, acid and alkali resistant, all-enclosed frame to ensure excellent operation environment, and nice in shape;

planer multi-arm manipulator functions stable, positions accurately and operates effectively;

plc computer control, human computer interface touch panel operation;

li protection, automatic constant temperature heating, filtering circulation, oil-water separation;

automatic feeding and discharging platform, convenient for feeding or discharging work-pieces;

e with throwing movement (rotation) cleaning function to ensure equal cleaning, avoiding the blind spots.