FSI清洗机PARTS
更新时间:2017-03-06 21:32:10 信息编号:5050896 发布者IP:122.200.91.178 浏览:570次- 供应商
- 中苇电子科技(上海)有限公司 商铺
- 认证
- 资质核验:已通过营业执照认证入驻顺企:第9年主体名称:中苇电子科技(上海)有限公司组织机构代码:91310109MA1G52KE8X
- 报价
- 请来电询价
- 品牌
- FSI
- 型号
- FSIPARTS
- 关键词
- FSI清洗机PARTS|FSI清洗机drain阀|FSI清洗机盖板气缸
- 所在地
- 上海市虹口区海宁路137号7层E座744I室
- 联系电话
- 021-31300381
- 手机号
- 17091315559
- 销售
- 赵先生 请说明来自顺企网,优惠更多
产品详细介绍
供应FSI清洗机零件
FSI Part # 04-18868 | Stainless High Pressure Bellows Valve, 3/8 in. |
FSI Part # 04-09805 | Stainless Reducer, 1/2 in. OD - 3/8 in. OD |
FSI Part # 04-08588-001 | PTFE Hose Assy,1/4".Tube Adapt OD,3/16", 12"LG |
FSI Part # 04-07737 | Wafergard Filter, F-40 |
FSI Part # 04-03423 | PTFE PRESSURE REGULATOR |
FSI Part # 04-03564 | PFA 1/4" GRIP 3WAY VALVE |
FSI Part # 04-01301 | VISI-FLOAT Flowmeter 200 SCFH Air |
FSI Part # 04-19104-001 | Brooks SHO-RATE Liquid Flowmeter |
FSI Part # 04-09250 | Dwyer Flowmeter 50 GPH Water |
FSI Part # 04-11739-001 | Flowmeter 32c.c./min. liquid SP.GR. 1.0 |
FSI Part # 04-11776 | Flowmeter 10 c.c/min. X 1000 |
FSI Part # 04-08931 | Flowmeter 60 GPH Water |
FSI Part # 04-23649-001 | Flowmeter 700ml/min water |
FSI Part # 04-27201-001 | Flowmeter 5.0 GPM Water |
FSI Part # 04-04389 | Rate-Master Flowmeter 100 SCFH Air |
FSI Part # 05-09773 | Liquid Flow Sensor 10C |
FSI Part # 04-27509-00 | 70mi. Source Reservoir |
FSI Part # 05-29712-001 | Power Line Filter |
FSI Part # 05-29029-001 A | Cannister Level Sen.-HMDS Ctrl w/display |
FSI Part # 05-29029-001 B | Cannister Level Sen. Interface-HMDS Ctrl |
FSI Part # 04-06314-001 | Cannister Level Sen. Interface-HMDS Ctrl |
FSI Part # 04-06145 | Flowmeter 1000cc/min. |
FSI Part # 05-14099 | Cannister Level Sensor-LG |
FSI Part # 05-26381-003 | Liquid Flow Sensor 8G |
FSI Part # 04-04947 | SHO-RATE Flowmeter 3 Channel 200mil/min |
FSI Part # 04-08901-001 | SHO-RATE Flowmeter 2 chanel 200/1300 |
FSI Part # 04-07854-001 | SHO-RATE Flowmeter 3channel 470ml/min. |
FSI Part # 04-07143-003 | SHO-RATE Flowmeter 2channel 200/470 |
FSI Part # 04-05412 | SHO-RATE Flowmeter 3channel 200ml/min. |
FSI Part # 04-21050-001 | SHO-RATE Flowmeter 3chanel 470/470/400 |
FSI Part # 05-27892-001 | Cannister Level Sensor - SM |
FSI Part # 04-07807 | Multi Flow Vacuum Transducer |
FSI Part # 02-26360-001 | Wall Mount Type Signal Tower |
FSI Part # 04-15033 | Twin Rod Cylinders HTDA-16mm |
FSI Part # 04-26065-001 | Multi-Stage Vacuum Generator |
FSI Part # 04-07832 | Teflon Liq. Regulator Valve |
FSI Part # 04-08588-004 | PTFE Hose Assy,1/4".Tube Adapt OD ,48" LG |
FSI Part # 04-04940 | Hose Connector, 3/16". ID, 1/8". MNPT |
FSI Part # 04-07524 | Flowmeter 50 SCFH AIR |
FSI Part # 02-24970-001 | Adjustable Pressure Switch |
FSI Part # 04-21012-001 | Stainless 3-Piece Ball Valve, Seat PCTFE |
FSI Part # 04-28687-001 | Stainless 3-Piece Ball Valve,FNPT, PTFE Seat |
FSI Part # 04-28909-001 | Stainless 1-Piece Ball Val., 1/2" FNPT, Angle |
FSI Part # 04-27418-001 | 6V. Connector, 3 way valve |
FSI Part # 04-07140 | Dash 1 Valves, 12VDC 0.6W |
FSI Part # 04-07541 | PTFE 2 WAY VALVE |
FSI Part # 04-15034 | Swich, Hall Effect Sensor, 118" |
FSI Part # 04-21049-001 | SHO-RATE Flowmeter 3 Channel 200mil/min |
FSI Part # 04-02154 | SHO-RATE Flowmeter 3 Channel 80mil/min |
FSI Part # 04-13731-001 | SHO-RATE Flowmeter 3 Channel |
FSI清洗机介绍
FSI用途:FSI用于圆片的表面清洗系统,可以去除颗粒、金属离子以及剥离部分氧化膜;
FSI设备全称: MERCURY MP Surface Condition Division System, FSI公司早期的Spray System Product;
FSI工作原理:在密封的Chamber中,圆片对称放在Turntable 上,在Turntable的旋转的同时利用N2把Chemical形成高雾化或者低雾化喷洒在圆片表面,有两个喷嘴:Spray post 和 Side-bowl spray post,达到去除颗粒、金属离子以及剥离部分氧化膜的目的,然后用DI Water 冲洗圆片表面,Zui后通过Turntable的高速旋转(500 rpm)以及N2 Purge来使圆片的表面干燥。
FSI用到的原料:主要有5种Chemical:H2SO4,HCL,HF,NH4OH,H2O2;还有DI Water(去离子水)、 N2和CDA(压缩空气)。 FSI常用工艺菜单:B-CLEAN,S*P5/1,POLY-BCLN,BP-BCLN; 安全措施:设备的每个部分都安装有Interlock 开关,禁止工艺时打开门、盖子等组件,如果Interlock 开关被打开,则会使设备停机,工艺中断;警告:工艺时禁止对FSI清洗机的任何部分进行任何操作。
相关产品:FSI清洗机PARTS , FSI清洗机drain阀 , FSI清洗机盖板气缸
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