5863E: Analog Thermal Mass Flow Meter, 100 - 1,000 slpm, Elastomer
Seals
The Brooks Model 5863E
elastomer sealed analog mass flow meter accurately measures gas
flows of 100 - 1,000 slpm (Nitrogen). Brooks’ extremely stable flow
sensor provides reliable, repeatable and accurate flow measurement
even under varying process conditions. It eliminates the need for
continuous monitoring and readjustment of gas pressures to provide
a stable gas flow.