百腾科技(苏州)有限公司是一家新加坡独资企业,本公司是世界上Zui的涂层设备和材料供应商;公司多年来一直潜心于真空技术的研发、制造和销售,主要产品有派瑞林真空敷膜机(parylene)、xef2蚀刻机等。
xef2etcher is a system for isotropic silicon etching by xef2vapour.
it offers a cost-effective solution forremoval of silicon as a sacrificial layer and its removal by xef2is the best-released process ever used formems devices.
besides the siliconlayer, xef2etcher also etches ta, w, mo andother materials, which can be etched by sf6 plasma. we can custom made your system according to your requirement.
key features
the etching is very gentle process, with no plasma involved.
etching of silicon is gas (vapor) process, and there is no liquid involved and therefore the notoriously known sticking problem is completely eliminated.
the implementation of a xef2process brings another advantage over the conventional mems release processes. it can be done at chip level even after packaging. the consequence is truly incredible.公司同时为广大客户提供线路板的parylene coating、dow corning、humiseal、dymax的喷涂加工服务。整块喷涂、元器件选择性喷涂,从运输,包装,上料,清洗,喷涂,提供整套专业防护服务。专业人员操作,完全按照国家标准和工艺喷涂,保证线路板加工安全和一致性。工厂设有专业的喷涂车间,干燥车间。欢迎广大客户选购本公司派瑞林喷涂设备或来料喷涂加工。公司宗旨:质量,服务满意!
本产品的加工定制是是,品牌是百腾,型号是PT-XEF2,用途是蚀刻