Aisin低温泵

 aisin's cryopumps consist of a separate compressor unit and a gm refrigerator which has an improved valve mechanism.

日本爱信低温泵系统包括两个独立分开的压缩机和gm原理制冷机。

 high productivity 高效

high productivity has been achieved by developing a high-output refrigerator with a long regeneration cycle, high throughput operation, and reduced cool-down time.

 通过研发出来的高效制冷机，实现了高效：很长的再生周期，高产量，较短的降温时间。

 simple maintenance维护简便

 maintenance has been simplified. valves do not require adjustment. in addition to valves, some components do not require adjustment.

 维修简化。（进出气）阀不需要调整，其它一些组件也是如此（编者注：比如深度）。

 high-performance compressor unit高效（氦气）压缩机

 the cryopump utilizes a high-capacity compressor and a high-performance oil separator to acheive long-term stable refrigeration output and long life for the adsorber.低温泵利用高效（氦气）压缩机和高效油气分离器，获得了持久稳定的制冷（功率）输出，同时也提高了吸附器的使用期限。

 high reliability高可靠性

 stable discharge characteristics have been achieved by using highly reliable seals, drive units, and valve mechanisms and by optimizing the panel shape.通过应用超高稳定的密封圈（编者注：尤其是一级蓄冷器密封），驱动单元，“进出气”阀机构，和优化面板形状，获得了稳定的排气（或者说“抽气”）性能。

 low-vibration pump unit低振动

uses a small, special three-phase motor, reduces vibrations to 1/40 of the convectional poduct( two-phases motor) .应用了小型三相电机，其振动只有传统电机（两相电机）的1/40。（编者注：三相电机是各个厂家的发展趋势，显著优势是振动小）。

applications应用

ion implanter for semiconductors, liquid crystal, vapor deposition e and so on. 半导体的离子注入、液晶、气相沉积（编者注：蒸发或溅射）。