纯度为99.7%的二氯二氢硅

inert gases

惰性气体

<1000 ppm

monochlorosilane

一氯甲硅烷

<800 ppm/w

trichlorosilane

三氯氢硅

<2000 ppm/w

silicon tetrachloride

四氯化硅

<300 ppm/w

carbon

碳

<0.05 ppm/w

aluminium

铝

<0.04 ppb/w

arsenic

砷

<0.03 ppb/w

boron

硼

<0.02 ppb/w

iron

铁

<3 ppb/w

phosphorus

磷

<0.05 ppb/w

o

氧

<1 ppm

resistivity

电阻系数

>400 ohm-cm

fill weight充装量(lbs)

90/50/10

valve connection阀门(cga)

678