CCD electric
ultra-high vacuum gate valve uses electric device to drive the
stem, moving valve disc up and down to make the valve opened or
closed. It is used to put through or cut off the airflow in vacuum
pipeline. Applicable medium can be pure air and noncorrosive
gases.
With signal feedback device.
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主要技术性能
Main Technical Performance
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适用范围:Applicability
105~1.3×10-7Pa
阀门漏率:Valve
Leak Rate
≤1.3×10-7Pa.L/S.(DN≤200)
≤6.7×10-7Pa.L/S.(DN≥250)
适用温度:Applicable Temperature
-30~+150℃
阀门开启时阀板两侧的压差:
The differential pressure between the two sides of valve disc
upon valve opening: